Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique /
Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2008
| Príomhchruthaitheoirí: | , , |
|---|---|
| Formáid: | |
| Teanga: | eng |
| Foilsithe / Cruthaithe: |
2008
|
| _version_ | 1826448596030980096 |
|---|---|
| author | 512245 Kartiyani Muniandy Bakar Ismail, supervisor Fakulti Sains |
| author_facet | 512245 Kartiyani Muniandy Bakar Ismail, supervisor Fakulti Sains |
| author_sort | 512245 Kartiyani Muniandy |
| collection | OCEAN |
| description | Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2008 |
| first_indexed | 2024-03-05T11:28:13Z |
| format | |
| id | KOHA-OAI-TEST:459445 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T11:28:13Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4594452020-12-19T17:16:48ZOptical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / 512245 Kartiyani Muniandy Bakar Ismail, supervisor Fakulti Sains 2008engThesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2008Includes bibliographical referencesFSL |
| spellingShingle | 512245 Kartiyani Muniandy Bakar Ismail, supervisor Fakulti Sains Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title | Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title_full | Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title_fullStr | Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title_full_unstemmed | Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title_short | Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique / |
| title_sort | optical characterization of annealed silicon carbide sic thin film deposited by rf magnetron sputtering technique |
| work_keys_str_mv | AT 512245kartiyanimuniandy opticalcharacterizationofannealedsiliconcarbidesicthinfilmdepositedbyrfmagnetronsputteringtechnique AT bakarismailsupervisor opticalcharacterizationofannealedsiliconcarbidesicthinfilmdepositedbyrfmagnetronsputteringtechnique AT fakultisains opticalcharacterizationofannealedsiliconcarbidesicthinfilmdepositedbyrfmagnetronsputteringtechnique |