Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /

Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /

Thesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2011

Bibliographic Details
Main Authors: Habib Hamidinezhad, 1975-, Yussof Wahab, supervisor, Zulkafli Othaman, supervisor, Fakulti Sains
Format:
Language:eng
Published: 2011
Subjects:
Silicon
Nanowires

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