Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /

Thesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2011

Bibliografski detalji
Glavni autori: Habib Hamidinezhad, 1975-, Yussof Wahab, supervisor, Zulkafli Othaman, supervisor, Fakulti Sains
Format:
Jezik:eng
Izdano: 2011
Teme:
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author Habib Hamidinezhad, 1975-
Yussof Wahab, supervisor
Zulkafli Othaman, supervisor
Fakulti Sains
author_facet Habib Hamidinezhad, 1975-
Yussof Wahab, supervisor
Zulkafli Othaman, supervisor
Fakulti Sains
author_sort Habib Hamidinezhad, 1975-
collection OCEAN
description Thesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2011
first_indexed 2024-03-05T11:34:16Z
format
id KOHA-OAI-TEST:461467
institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T11:34:16Z
publishDate 2011
record_format dspace
spelling KOHA-OAI-TEST:4614672020-12-19T17:16:53ZStructural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition / Habib Hamidinezhad, 1975- Yussof Wahab, supervisor Zulkafli Othaman, supervisor Fakulti Sains 2011engThesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2011Includes bibliographical referencesSPSLSilicon Nanowires
spellingShingle Silicon
Nanowires
Habib Hamidinezhad, 1975-
Yussof Wahab, supervisor
Zulkafli Othaman, supervisor
Fakulti Sains
Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title_full Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title_fullStr Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title_full_unstemmed Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title_short Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition /
title_sort structural characterization of silicon nanowires grown by a 150 mhz very high frequency plasma enhanced chemical vapor deposition
topic Silicon
Nanowires
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AT yussofwahabsupervisor structuralcharacterizationofsiliconnanowiresgrownbya150mhzveryhighfrequencyplasmaenhancedchemicalvapordeposition
AT zulkafliothamansupervisor structuralcharacterizationofsiliconnanowiresgrownbya150mhzveryhighfrequencyplasmaenhancedchemicalvapordeposition
AT fakultisains structuralcharacterizationofsiliconnanowiresgrownbya150mhzveryhighfrequencyplasmaenhancedchemicalvapordeposition