The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system /

The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system /

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Bibliographic Details
Main Authors: Putut Marwoto, Samsudi Sakrani, Bakar Ismail, Yusof Wahab, Karim Deraman, Regional Seminar on Solid State Science (16th : 1999 : Penang)
Format:
Language:eng
Published: Skudai : Universiti Teknologi Malaysia, 1999
Subjects:
Thin films
Plasma-enhanced chemical vapor deposition

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