The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system /
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| Main Authors: | , , , , , |
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| Format: | |
| Language: | eng |
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Skudai : Universiti Teknologi Malaysia,
1999
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| _version_ | 1826364281626558464 |
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| author | Putut Marwoto Samsudi Sakrani Bakar Ismail Yusof Wahab Karim Deraman Regional Seminar on Solid State Science (16th : 1999 : Penang) |
| author_facet | Putut Marwoto Samsudi Sakrani Bakar Ismail Yusof Wahab Karim Deraman Regional Seminar on Solid State Science (16th : 1999 : Penang) |
| author_sort | Putut Marwoto |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T14:47:38Z |
| format | |
| id | KOHA-OAI-TEST:46341 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T14:47:38Z |
| publishDate | 1999 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:463412020-12-19T16:58:24ZThe construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / Putut Marwoto Samsudi Sakrani Bakar Ismail Yusof Wahab Karim Deraman Regional Seminar on Solid State Science (16th : 1999 : Penang) Skudai : Universiti Teknologi Malaysia,1999eng16PSZJBLThin filmsPlasma-enhanced chemical vapor deposition |
| spellingShingle | Thin films Plasma-enhanced chemical vapor deposition Putut Marwoto Samsudi Sakrani Bakar Ismail Yusof Wahab Karim Deraman Regional Seminar on Solid State Science (16th : 1999 : Penang) The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title | The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title_full | The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title_fullStr | The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title_full_unstemmed | The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title_short | The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system / |
| title_sort | construction of plasma reactor chamber and radio frequency generator in the rf pecvd system |
| topic | Thin films Plasma-enhanced chemical vapor deposition |
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