Handbook of Deposition Technologies for Films and Coatings : Science, Applications and Technology /
This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thi...
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Format: | text |
Language: | eng |
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Amsterdam ; Boston : Elsevier,
2010
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