Advances in CMP/polishing technologies for the manufacture of electronic devices /
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover
| Main Authors: | , , |
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| Format: | text |
| Language: | eng |
| Published: |
Oxford, ENK. ; New York : Elsevier,
2012
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| Subjects: |