Substrate surface preparation handbook / Max Robertson
Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Norwood, M.A. : Artech House,
c201
|
| Subjects: |