Substrate surface preparation handbook / Max Robertson
Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Norwood, M.A. : Artech House,
c201
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| Subjects: |
| _version_ | 1796744710887309312 |
|---|---|
| author | Robertson, Max |
| author_facet | Robertson, Max |
| author_sort | Robertson, Max |
| collection | OCEAN |
| description | Introduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using Interferometry |
| first_indexed | 2024-03-05T12:30:24Z |
| format | |
| id | KOHA-OAI-TEST:480162 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T12:30:24Z |
| publishDate | c201 |
| publisher | Norwood, M.A. : Artech House, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4801622020-12-19T17:17:43ZSubstrate surface preparation handbook / Max Robertson Robertson, Max Norwood, M.A. : Artech House,c2012engIntroduction -- Preparation : before the start -- Lapping -- Polishing -- Specific processes and materials -- Specialized techniques -- Surface finish -- Optics -- Semiconductor device Deconstruction -- Metallurgical Polishing and Microscopy -- Laboratory Setup -- Using InterferometryPSZJBLSemiconductorsEpitaxyURN:ISBN:9781608072132 (hbk.)URN:ISBN:1608072134 (hbk.) |
| spellingShingle | Semiconductors Epitaxy Robertson, Max Substrate surface preparation handbook / Max Robertson |
| title | Substrate surface preparation handbook / Max Robertson |
| title_full | Substrate surface preparation handbook / Max Robertson |
| title_fullStr | Substrate surface preparation handbook / Max Robertson |
| title_full_unstemmed | Substrate surface preparation handbook / Max Robertson |
| title_short | Substrate surface preparation handbook / Max Robertson |
| title_sort | substrate surface preparation handbook max robertson |
| topic | Semiconductors Epitaxy |
| work_keys_str_mv | AT robertsonmax substratesurfacepreparationhandbookmaxrobertson |