MEMS, bioMEMS and bioelectronics--materials and devices : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /
Includes bibliographical references and indexes
Main Authors: | , , , , |
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Format: | |
Language: | eng |
Published: |
Warrendale, Pa. : Materials Research Society : Cambridge : Cambridge University Press,
2012
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Subjects: |