Electrical properties of copper nitride thin film prepared by reactive DC sputtering /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2013

Bibliographic Details
Main Authors:	Wan Noor Ezianti Wan Mohd. Noral Azman, 1986-, Bakar Ismail, supervisor, Fakulti Sains
Format:
Language:	eng
Published:	2013
Subjects:	Thin films Sputtering (Physics)

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