Micro- and nanotechnology sensors, systems, and applications IV : 23-27 April 2012, Baltimore, Maryland, United States /

Micro- and nanotechnology sensors, systems, and applications IV : 23-27 April 2012, Baltimore, Maryland, United States /

Includes bibliographical references and index

Bibliographic Details
Main Authors: Micro-and nanotechnology sensors, systems and applications (Conference) (4th : 2012 Apr : Baltimore, MD) 546789, George, Thomas 203446, Islam, M. Saiful, 1970- 546790, Dutta, Achyut K. 546791
Format:
Language:eng
Published: Bellingham, Wash. : SPIE, c201
Subjects:
Nanophotonics
Nanotechnology
Nanoelectronics
Nanoelectromechanical systems
Microelectromechanical systems

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