Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2011

Bibliographic Details
Main Author:	441403 Siti Noraiza Ab. Razak
Format:
Language:	eng
Published:	2011
Subjects:	Silicon Silicon crystals