Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2011

Bibliographische Detailangaben
1. Verfasser:	441403 Siti Noraiza Ab. Razak
Format:
Sprache:	eng
Veröffentlicht:	2011
Schlagworte:	Silicon Silicon crystals