Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Crystallization of polycrystalline silicon thin film by excimer laser annealin [electronic resource] /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2011

Detalhes bibliográficos
Autor principal:	441403 Siti Noraiza Ab. Razak
Formato:
Idioma:	eng
Publicado em:	2011
Assuntos:	Silicon Silicon crystals