Electrical properties of copper nitride thin film prepared by reactive DC sputtering [electronic resource] /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2013

Bibliographic Details
Main Author: Wan Noor Ezianti Wan Mohd. Noral Azman, 1986-
Format:
Language:eng
Published: 2013
Subjects: