Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012

Bibliographic Details
Main Author: Nurul Aini Tarjudin, 1985-
Format:
Language:eng
Published: 2012
Subjects: