Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] /
Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012
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Language: | eng |
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2012
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author | Nurul Aini Tarjudin, 1985- |
author_facet | Nurul Aini Tarjudin, 1985- |
author_sort | Nurul Aini Tarjudin, 1985- |
collection | OCEAN |
description | Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012 |
first_indexed | 2024-03-05T12:38:18Z |
format | |
id | KOHA-OAI-TEST:482788 |
institution | Universiti Teknologi Malaysia - OCEAN |
language | eng |
last_indexed | 2024-03-05T12:38:18Z |
publishDate | 2012 |
record_format | dspace |
spelling | KOHA-OAI-TEST:4827882020-12-19T17:17:48ZStructural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / Nurul Aini Tarjudin, 1985- 2012engThesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012Includes bibliographical referencesPSZJBLNanocrystalsNanostructured materialsThin films |
spellingShingle | Nanocrystals Nanostructured materials Thin films Nurul Aini Tarjudin, 1985- Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title | Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title_full | Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title_fullStr | Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title_full_unstemmed | Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title_short | Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] / |
title_sort | structural and optical properties of nanocrystalline silicon thin films grown by 150mhz vhf pecvd electronic resource |
topic | Nanocrystals Nanostructured materials Thin films |
work_keys_str_mv | AT nurulainitarjudin1985 structuralandopticalpropertiesofnanocrystallinesiliconthinfilmsgrownby150mhzvhfpecvdelectronicresource |