Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD [electronic resource] /
Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2012
Main Author: | Nurul Aini Tarjudin, 1985- |
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Format: | |
Language: | eng |
Published: |
2012
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