Low temperature deposition of hydrogenated nanocrystalline SiC films by helicon wave plasma enhanced chemical vapor deposition/

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Bibliographic Details
Main Authors:	496878 Yu, Wei, Lu, Wanbing, Teng, Xiaoyun, Ding, Wenge, Han, Li, Fu, Guangsheng
Format:
Language:	eng
Subjects:	Chemistry Hydrogenation

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