Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films/

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Bibliographic Details
Main Authors:	Choi, W. K., Ong, T.Y., Tan, L.S., Loh, F.C.
Format:
Language:	eng
Subjects:	Physics X-ray photoelectron spectroscopy

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