Micro process engineering : fundamentals, devices, fabrication, and applications /
Includes bibliographical references and index
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Weinheim : Wiley-VCH,
2006
|
| Subjects: |
Includes bibliographical references and index
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Weinheim : Wiley-VCH,
2006
|
| Subjects: |