Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /
"Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conv...
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| Language: | eng |
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Oxford ; Philadelphia : Woodhead Publishing,
2014
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