Compact plasma and focused ion beams /

Compact plasma and focused ion beams /

Includes bibliographical references and index

Bibliographic Details
Main Author:	Bhattacharjee, Sudeep, author
Format:
Language:	eng
Published:	Boca Raton : CRC Press, Taylor & Francis Group, 201
Subjects:	Microwave plasmas Plasma (Ionized gases) Focused ion beams

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