Micromachining techniques and applications /
The extensive techniques and applications of micromachining are elucidated in this profound book. Micromachining is used to fabricate 3D microstructures and it is the base of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are the two most...
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New York : NY Research Press,
2015
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