Material, process and geometry effects on through-silicon via reliability and isolation /

Material, process and geometry effects on through-silicon via reliability and isolation /

PSZJBL

Bibliographic Details
Main Authors: Karmarkar, Aditya P author, Xu, Xiaopeng author, Ramaswami, Sesh author, Dukovic, John author, Sapre, Kedar author, Bhatnagar, Ajay author
Format:
Language:eng
Published: Pennsylvania : Materials Research Society, 2010
Subjects:
Social isolation

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