Handbook of Microelectromechanical Systems /
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nanoscale into nanoelectromechanical systems (NEMS...
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| Format: | text |
| Language: | eng |
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Delhi, India : World Technologies,
2012
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| Online Access: | http://repository.library.utm.my/2804 |