Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis /
Thesis (Doktor Falsafah (Fizik)) - Universiti Teknologi Malaysia, 2019
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| Format: | text |
| Language: | eng |
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Johor Bahru, Johor : Universiti Teknologi Malaysia,
2019
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