Fundamentals of microfabrication : the science of miniaturization /

Fundamentals of microfabrication : the science of miniaturization /

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Bibliographic Details
Main Author: 302240 Madou, Marc J.
Format:
Language:eng
Published: Boca Raton, FL : CRC Press, 2002
Subjects:
Microelectronics
Integrated circuits
Microelectromechanical systems
Machining

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