Fundamentals of microfabrication : the science of miniaturization /

Fundamentals of microfabrication : the science of miniaturization /

16

Bibliographic Details
Main Author:	302240 Madou, Marc J.
Format:
Language:	eng
Published:	Boca Raton, FL : CRC Press, 2002
Subjects:	Microelectronics Integrated circuits Microelectromechanical systems Machining

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