Unified analytic formula for physical sputtering yield at normal ion incidence /
PSZJBL
| Main Authors: | , , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Toki, Japan : NIFS,
2001
|
| Subjects: |
PSZJBL
| Main Authors: | , , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Toki, Japan : NIFS,
2001
|
| Subjects: |