Unified analytic formula for physical sputtering yield at normal ion incidence /
PSZJBL
Autors principals: | , , |
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Format: | |
Idioma: | eng |
Publicat: |
Toki, Japan : NIFS,
2001
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Matèries: |
Sumari: | PSZJBL |
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PSZJBL
Autors principals: | , , |
---|---|
Format: | |
Idioma: | eng |
Publicat: |
Toki, Japan : NIFS,
2001
|
Matèries: |
Sumari: | PSZJBL |
---|