Run-to-run control in semiconductor manufacturing /

Bibliographic Details
Main Authors:	Moyne, James, Del Castillo, Enrique, Hurwitz, Arnon Max
Format:
Language:	eng
Published:	Boca Raton : CRC Press, 2001
Subjects:	Semiconductors Semiconductor industry Electronic packaging Production management
Online Access:	http://www.engnetbase.com/ejournals/books/book_summary/summary.asp?id=500

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