Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /

Eitemau Tebyg

• Studies of the chemistry of plasmas used for semiconductor etching
  gan: Toogood, M, et al.
  Cyhoeddwyd: (1991)
• Plasma etching in semiconductor fabrication /
  gan: 217469 Morgan, Russ A.
  Cyhoeddwyd: (1985)
• Studies on etching and polymer deposition in halocarbon plasmas
  gan: Astell-Burt, P, et al.
  Cyhoeddwyd: (1987)
• Dry etching for VLSI /
  gan: 198063 Roosmalen, A. J. Van, et al.
  Cyhoeddwyd: (1991)
• Plasma technology in wool /
  gan: Kan, C. W., et al.
  Cyhoeddwyd: (2007)