Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /

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Bibliographic Details
Main Authors: Rossnagel, Stephen M., Cuomo, Jerome J., Westwood, William D. (William Dickson), 1937-
Format:
Published: Norwich : Noyes Publications, 1990
Subjects:
Plasma engineering
Semiconductors
Plasma etching

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