Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
40
| Main Authors: | , , |
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| Format: | |
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Norwich : Noyes Publications,
1990
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| _version_ | 1826374621891395584 |
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| author | Rossnagel, Stephen M. Cuomo, Jerome J. Westwood, William D. (William Dickson), 1937- |
| author_facet | Rossnagel, Stephen M. Cuomo, Jerome J. Westwood, William D. (William Dickson), 1937- |
| author_sort | Rossnagel, Stephen M. |
| collection | OCEAN |
| description | 40 |
| first_indexed | 2024-03-04T17:20:03Z |
| format | |
| id | KOHA-OAI-TEST:97142 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T17:20:03Z |
| publishDate | 1990 |
| publisher | Norwich : Noyes Publications, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:971422020-12-19T17:01:20ZHandbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / Rossnagel, Stephen M. Cuomo, Jerome J. Westwood, William D. (William Dickson), 1937- Norwich : Noyes Publications,199040PSZJBLPlasma engineeringSemiconductorsPlasma etchingURN:ISBN:0815512201 (hbk.) |
| spellingShingle | Plasma engineering Semiconductors Plasma etching Rossnagel, Stephen M. Cuomo, Jerome J. Westwood, William D. (William Dickson), 1937- Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title | Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title_full | Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title_fullStr | Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title_full_unstemmed | Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title_short | Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / |
| title_sort | handbook of plasma processing technology fundamentals etching deposition and surface interactions |
| topic | Plasma engineering Semiconductors Plasma etching |
| work_keys_str_mv | AT rossnagelstephenm handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions AT cuomojeromej handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions AT westwoodwilliamdwilliamdickson1937 handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions |