Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study
In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-,...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
World Scientific Publishing Co Pte Ltd
2017
|
| Subjects: | |
| Online Access: | http://umpir.ump.edu.my/id/eprint/16921/1/fkee-2017-Vigneswaran-Design%20optimization1.pdf |