Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the exp...

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Bibliographic Details
Main Authors: Shaaban, Essam R., Metawa, A. E., Almohammedi, A., Algarni, H., Hassan, A. M., Ali, Gomaa A. M., Ashour, A.
Format: Article
Language:English
Published: Institute of Physics Publishing 2018
Subjects:
Q Science (General)
Online Access:http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf

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http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf

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