Investigation of structural and optical properties of near surface of CdTe film induced by nitrogen plasma immersion ion implantation

Plasma immersion ion implantation (PIII) is an important technique for performing a shallow junction for microelectronic applications. This work describes the effect of nitrogen PIII on structural, morphological and optical properties of CdTe thin films. To optimize the implantation results, the exp...

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Hlavní autoři: Shaaban, Essam R., Metawa, A. E., Almohammedi, A., Algarni, H., Hassan, A. M., Ali, Gomaa A. M., Ashour, A.
Médium: Článek
Jazyk:English
Vydáno: Institute of Physics Publishing 2018
Témata:
On-line přístup:http://umpir.ump.edu.my/id/eprint/22153/1/Investigation%20of%20structural%20and%20optical%20properties%20of%20near%20surface.pdf