Deep multilevel wet etching of fused silica glass microstructures in BOE solution

Deep multilevel wet etching of fused silica glass microstructures in BOE solution

Abstract Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its chemical resistance, optical, electrical, and mechanical performance. Wet etching is the key method for fabricating of such microdevices. Protective mask integrity is a big challenge...

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Bibliographic Details
Main Authors: T. G. Konstantinova, M. M. Andronic, D. A. Baklykov, V. E. Stukalova, D. A. Ezenkova, E. V. Zikiy, M. V. Bashinova, A. A. Solovev, E. S. Lotkov, I. A. Ryzhikov, I. A. Rodionov
Format: Article
Language:English
Published: Nature Portfolio 2023-03-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-32503-w

Internet

https://doi.org/10.1038/s41598-023-32503-w

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