Developing an Interferogram-Based Module with Machine Learning for Maintaining Leveling of Glass Substrates
In this research, we propose a method that utilizes machine learning to maintain the parallelism of the resonant cavity in a Fabry–Perot interferometer designed specifically for glass substrates. Based on the optical principle and theory, we establish a proportional relationship between interference...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-06-01
|
| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/11/6/668 |