Improving Accuracy of IC Surface Defects Detection via Enhanced-CycleGAN Data Augmentation
An important step in integrated circuit (IC) manufacturing is inspection of the chip surface for defects. In practice, there exists a data imbalance problem associated with IC surface defect images which affects the detection performance of a deep learning-based detection model. In this paper, this...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10883946/ |