Optical Calibration of a Multi-Color Ellipsometric Mapping Tool Fabricated Using Cheap Parts

We developed and applied a new calibration method to make more accurate measurements with our multi-color ellipsometric mapping tool made from cheap parts. Ellipsometry is an optical technique that measures the relative change in the polarization state of the measurement beam induced by reflection f...

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Bibliographic Details
Main Authors: Berhane Nugusse Zereay, Sándor Kálvin, György Juhász, Csaba Major, Péter Petrik, Zoltán György Horváth, Miklós Fried
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Photonics
Subjects:
Online Access:https://www.mdpi.com/2304-6732/11/11/1036