A novel soft deposition methodology for textured ZnO:Al thin films as efficient transparent conductive oxide layers

A novel soft deposition methodology for textured ZnO:Al thin films as efficient transparent conductive oxide layers

In this paper, a novel soft deposition methodology was developed for depositing Al-doped ZnO (AZO) thin films as Transparent Conducting Oxide (TCO) layer. The new proposed methodology could help in reducing the process time and cost that could subsequently be useful for industrial scalability purpos...

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Bibliographic Details
Main Authors: Karina Portillo-Cortez, Selene R. Islas, Amauri Serrano-Lázaro, A. Ortiz, M.F. García-Sánchez, J.C. Alonso, Ana Martínez, C. Ramos, A. Dutt, G. Santana
Format: Article
Language:English
Published: Elsevier 2022-06-01
Series:Applied Surface Science Advances
Subjects:
AZO
TCO film
Soft conditions
DC magnetron sputtering
Online Access:http://www.sciencedirect.com/science/article/pii/S2666523922000459

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http://www.sciencedirect.com/science/article/pii/S2666523922000459

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