Comparative investigation of the structure and mechanical properties of AlCrN and AlCrVYN thin films deposited by dcMS, HiPIMS, and hybrid dcMS/HiPIMS

Comparative investigation of the structure and mechanical properties of AlCrN and AlCrVYN thin films deposited by dcMS, HiPIMS, and hybrid dcMS/HiPIMS

AlCrN and AlCrVYN thin films were deposited by physical vapor deposition using dcMS, HiPIMS and hybrid dcMS/HiPIMS processes. Although all the thin films were produced using the same time-average power and show only slight differences in the chemical composition, significant differences regarding th...

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Bibliographic Details
Main Authors: Wolfgang Tillmann, Finn Ontrup, Eric Schneider, Michael Paulus, Christian Sternemann, Nelson Filipe Lopes Dias
Format: Article
Language:English
Published: Elsevier 2024-04-01
Series:Hybrid Advances
Subjects:
AlCrN
AlCrVYN
Direct current magnetron sputtering
High power impulse magnetron sputtering
Hybrid PVD process
Mechanical properties
Online Access:http://www.sciencedirect.com/science/article/pii/S2773207X23001033

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http://www.sciencedirect.com/science/article/pii/S2773207X23001033

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