Structural and mechanical properties study of CNx/MoS2 multilayer coatings obtained by sputtering
This work documents the study of samples of CN _x /MoS _2 multilayer coatings, deposited by magnetron sputtering technique, using 10% and 16% of N _2 concentration in the Ar/N _2 gas mixture to obtain two sample sets with different nitrogen concentrations in the CN _x layers. The samples were grown...
Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2020-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/abcac0 |