Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication

Structure Fabrication on Silicon at Atomic and Close-To-Atomic Scale Using Atomic Force Microscopy: Implications for Nanopatterning and Nanodevice Fabrication

In this paper, the atomic-scale structure fabrication on Si (100) substrate using atomic force microscopy (AFM) with the aid of electrochemical and mechanical processes in a humid environment and under ambient conditions is studied. The local oxidation patterns are formed using platinum-coated tips...

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Bibliographic Details
Main Authors: Paven Thomas Mathew, Wei Han, Brian J. Rodriguez, Fengzhou Fang
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Micromachines
Subjects:
atomic force microscopy
atomic and close-to-atomic scale manufacturing
silicon
manufacturing III
semiconductors
Online Access:https://www.mdpi.com/2072-666X/13/4/524

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https://www.mdpi.com/2072-666X/13/4/524

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