Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiN<sub>x</sub>/La:HfO<sub>2</sub>/TiN<sub>x</sub> Stacks Grown by PEALD on SiO<sub>2</sub>/Si

Structure, Oxygen Content and Electric Properties of Titanium Nitride Electrodes in TiN<sub>x</sub>/La:HfO<sub>2</sub>/TiN<sub>x</sub> Stacks Grown by PEALD on SiO<sub>2</sub>/Si

This work reports experimental results of the quantitative determination of oxygen and band gap measurement in the TiN<sub>x</sub> electrodes in planar TiN<sub>x</sub> top/La:HfO<sub>2</sub>/TiN<sub>x</sub> bottom MIM stacks obtained by plasma enhanced...

Full description

Bibliographic Details
Main Authors: Elena I. Suvorova, Oleg V. Uvarov, Kirill V. Chizh, Alexey A. Klimenko, Philippe A. Buffat
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Nanomaterials
Subjects:
titanium nitride
titanium oxynitride
MIM stack
transmission electron microscopy
energy dispersive X-ray spectrometry
electron energy loss spectroscopy
Online Access:https://www.mdpi.com/2079-4991/12/20/3608

Internet

https://www.mdpi.com/2079-4991/12/20/3608

Similar Items