MONTE CARLO SIMULATION OF INTERACTION BETWEEN AN ELECTRON BEAM AND A NANO-SILICON FILM
Due to the fundamental role played by the interaction electron-matter in scanning electron microscopy (Electron Beam Induced Current -EBIC- in Silicon case), a Monte Carlo calculation model of this interaction applied in silicon nanostructure (nano-film) is presented in the present paper. After a...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
El Oued University
2018-12-01
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| Series: | Journal of Fundamental and Applied Sciences |
| Subjects: | |
| Online Access: | http://www.jfas.info/index.php/JFAS/article/view/46 |