Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes
This study investigates the nonlinear dynamic response behavior of a rotating ring that forms an essential element of MEMS (Micro Electro Mechanical Systems) ring-based vibratory gyroscopes that utilize oscillatory nonlinear electrostatic forces. For this purpose, the dynamic behavior due to nonline...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2021-10-01
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Series: | Vibration |
Subjects: | |
Online Access: | https://www.mdpi.com/2571-631X/4/4/45 |