A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring

In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline leaks. The proposed MEMS Hydrophone consists of a piezoelectric micromachined ultrasonic transducer (PMUT) array, an acoustic m...

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Bibliographic Details
Main Authors: Baoyu Zhi, Zhipeng Wu, Caihui Chen, Minkan Chen, Xiaoxia Ding, Liang Lou
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
MEMS hydrophone
PMUT
leak detection
leak localization
Online Access:https://www.mdpi.com/2072-666X/14/3/654

Internet

https://www.mdpi.com/2072-666X/14/3/654

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