Characteristics of a Source for Oxide Coating Deposition by the Electron-Beam Evaporation of Dielectric Materials
We describe our investigations of a plasma-cathode electron source designed for the deposition of oxide coatings by the electron-beam evaporation of dielectric materials. Tests carried out using oxygen as the working gas showed that the source is operable without a change in parameters for at least...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-05-01
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Series: | Plasma |
Subjects: | |
Online Access: | https://www.mdpi.com/2571-6182/5/2/20 |