Characteristics of a Source for Oxide Coating Deposition by the Electron-Beam Evaporation of Dielectric Materials

Characteristics of a Source for Oxide Coating Deposition by the Electron-Beam Evaporation of Dielectric Materials

We describe our investigations of a plasma-cathode electron source designed for the deposition of oxide coatings by the electron-beam evaporation of dielectric materials. Tests carried out using oxygen as the working gas showed that the source is operable without a change in parameters for at least...

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Bibliographic Details
Main Authors: Viktor Burdovitsin, Ilya Bakeev, Kirill Karpov, Lionel Ngon A. Kiki, Efim Oks, Alexey Vizir
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Plasma
Subjects:
electron beam
plasma source
plasma cathode
electron source characteristics
oxygen environment
Online Access:https://www.mdpi.com/2571-6182/5/2/20

Internet

https://www.mdpi.com/2571-6182/5/2/20

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